窄线宽MOPA系统
特点
l 超窄线宽0.5pm, 0.3pm, 0.08pm
l 可调谐VUV光源
l MOPA窄线系统
应用
l 光谱学
l 半导体度量学光学测试
l MOPA系统具有0.3pm光谱宽度, 10mJ脉冲能量输出
产品描述
窄带激光使用内腔波长色散光学元件将自由振荡的激光波长压缩到低于1pm。自由振荡准分子激光的光谱带宽为500pm(FWHM),通过插入光学元件可以极大地压缩光谱带宽。目前,能提供1000Hz的MOPA系统,主振荡器在193nm波长处输出能量为3mJ,在248nm波长处输出能量为8mJ,经过功率放大后输出单脉冲能量可以达到100mJ。
PARAMETER
|
F2
|
ArF
|
KrF
|
XeCl
|
XeF
|
Wavelength nm line center
|
157
|
193.3
|
248.35
|
308-311
|
351, 533
|
Energy Max. Broadband mJ
|
4
|
15
|
25
|
15
|
10
|
Energy Max. 1-2pm FWHM mJ
|
1 Line
|
3
|
5
|
3
|
|
Tuning Range pm
|
|
+/- 200
|
+/-200
|
N/A
|
|
Average Power 125Hz
|
|
0.30
|
0.75
|
0.30
|
|
Average Power @250Hz
|
|
0.50
|
1.0
|
0.50
|
|
Average Power @500Hz
|
|
1.0
|
2.0
|
1.5
|
|
Average Power @1000Hz W
|
Call
|
1.5
|
3.0
|
1.0
|
|
Dynamic gas lifetime Pulses to 50% energy*
|
10E6
|
12E6
|
15E6
|
20E6
|
15E6
|
Shelf life Approx. to 50% energy
|
10 days
|
20 days
|
30 days
|
90 Days
|
30 Days
|
Pulse Length, ns
|
14-18
|
Beam Size, mm
|
9 X 4
|
Divergence, mRad full angle
|
0.8 X 1.6
|
Tube Service
|
2-3 Billion Pulses
|
Window Service
|
200E6
|
>500E6
|
>500E6
|
|
|
Cooling
|
Air/Water
|